Lecturer: Dr. Yoni Shalibo
Affiliation: KLA-Tencor Israel
Abstract:
The semiconductor industry drives
the technological and increasingly
sophisticated world we live in. Since
the 1960s it provides a steady,
exponential increase in computing
power and memory density while
reducing the cost per element
(transistor) proportionally. To allow
this trend, it had to continuously
invent new methods to shrink
transistor size, cost-effectively.
Moreover, the growing complexity
and number of processing steps
necessitates the use of advanced
inspection and metrology tools to
keep the yield high. KLA-Tencor is
the leading supplier of inspection
and metrology tools for the
semiconductor industry. In this talk,
I will give a top-down view on
semiconductor chip manufacturing,
with an emphasis on KLA-Tencor’s
solutions and its role in the industry.
I will then dwell into the challenges
of overlay metrology, the main
business of KLA-Tencor Israel.